000 00462cam a2200169ua 4500
001 1456
008 111215n2002 ii |||gr||||Z||||||eng
020 _a9780070487093
040 _aIN-GwRGU
082 _a621.381
100 1 _a Hsu,Tai-Ran ,
_eAuthor.
245 0 0 _aMEMS & MICROSYSTEMS DESIGN AND MANUFACTURE
_cBy Tai-Ran Hsu
260 _aNew Delhi
_bTata Mc Graw Hill
_c2002
300 _axii,436p:
_c22cm.
650 _aMechanical Engineering
942 _2ddc
_cBK
999 _c1428
_d1428