TY  - BOOK
AU  -  Hsu,Tai-Ran
TI  - MEMS & MICROSYSTEMS DESIGN AND MANUFACTURE
SN  - 9780070487093
U1  - 621.381 
PY  - 2002///
CY  - New Delhi
PB  - Tata Mc Graw Hill
KW  - Mechanical Engineering
ER  -