Hsu,Tai-Ran , <br/><br/>
MEMS & MICROSYSTEMS DESIGN AND MANUFACTURE 
By Tai-Ran Hsu 
 - New Delhi  Tata Mc Graw Hill  2002 
 - xii,436p:  22cm. 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical Engineering
<br/><br/><label>Dewey Class. No.: </label>621.381